Optical Emission Spectroscopy of Hγ, Hα, and Hβ in a Glow Discharge Mixture of Ar/H2

被引:6
|
作者
Tones, Juana [1 ]
Guillermo Reyes, Pedro [1 ]
Tones, Cesar [1 ]
Martinez, Horacio [2 ]
Vergara, Josefina [3 ]
机构
[1] Univ Autonoma Estado Mexico, Fac Ciencias, Toluca 50000, Mexico
[2] Univ Nacl Autonoma Mexico, Inst Ciencias Fis, Mexico City 04510, DF, Mexico
[3] Univ Autonoma Estado Morelos, Inst Profes Reg Oriente, Cuernavaca 62350, Morelos, Mexico
关键词
Balmer lines; glow discharge; low pressure plasma; low temperature plasma; optical emission spectroscopy (OES) of cold plasma; PLASMA PARAMETERS; LANGMUIR PROBE; GAS;
D O I
10.1109/TPS.2015.2395141
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
In this paper, the addition of Ar to 112 is experimentally investigated. This paper primarily aims to observe the effects that this addition has on the intensity of hydrogen emission lines in a glow discharge mixture. The total pressure was 3 torr, at a power level of 3.9 W. Optical emission spectroscopy was used for plasma characterization, and the principal species observed were H-gamma (434 nm), H-beta (486.1 nm), Ha (656.3 nm), and 112 (603.1 nm), and Ar I (750.5 nm), Ar I (763.5 nm), and Ar I (811.6 nm). The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found to be in the range of 2.5-6.5 eV, and the ion concentration was on the order of 109 cm(-3).
引用
收藏
页码:846 / 850
页数:5
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