Electron cyclotron resonance (ECR) sputtered antireflection coatings on laser facets for optical memory applications

Antireflection (AR) layer coated semiconductor laser diodes may have many applications. particularly as external cavity diodes for optical memory heads. The electron cyclotron resonance (ECR) sputtering system was used for preparing AR coatings which consist of both SiO2 and Si3N4 phases. The refractive index and the thickness of the AR coatings were adjusted by controlling numerous deposition parameters, including the relative flow ratio of O-2 and N-2 gas flow, the total gas flow rate. the RF and ECR power, and the deposition time. AR seated AlGaAs laser diodes do not show a sharp threshold in the light output-current characteristic curve and have good potential for application in the lensless optical floppy systems.