AN ELECTRON-CYCLOTRON RESONANCE (ECR) PLASMA SOURCE

被引：0
|
作者：
KRETSCHMER, KH
MATL, K
LORENZ, G
KESSLER, I
DUMBACHER, B
机构：
[1] LEYBOLD AG,ALZENAU,GERMANY
[2] FACHHOCHSCH FRANKFURT,FRANKFURT,GERMANY
来源：
SOLID STATE TECHNOLOGY | 1990年 / 33卷 / 02期
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：53 / 55
页数：3
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