Lateral characteristic calibration of an atomic force microscope using a Cr atomic deposition grating

This paper presents the lateral characteristic calibration of an atomic force microscope (AFM) using a Cr atomic deposition grating. A Cr atomic deposition grating with a pitch of 212.8 nm was used to calibrate the lateral properties of the AFM. The pitch of the Cr atomic deposition grating can be directly traced to the standing laser wavelength. The coefficient of the AFM has been corrected according to the calibration results. Then, a 3-mu m grating was measured before and after calibration to verify the effectiveness of the calibration. The uncertainty of the measurement result was analyzed.