Fabrication Facilities and Operational Model at MIT's Microsystems Technology Labs

被引：0
|
作者：
Diadiuk, Vicky [1 ]
机构：
[1] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA
来源：
2010 18TH BIENNIAL UNIVERSITY/GOVERNMENT/INDUSTRY MICRO-NANO SYMPOSIUM | 2010年
关键词：
micro/nano-fabrication; university fab management; billing software;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The mission of the Microsystems Technology Laboratories (MTL) is to provide facilities for education and research in micro and nano technology and innovative devices. This paper describes details of its operation, including cost structure, fab management and billing software, interactions with industry, government labs and other universities will be described.
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页数：3
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