Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography

被引:21
|
作者
Viheriala, J. [1 ]
Niemi, T. [1 ]
Kontio, J. [1 ]
Rytkonen, T. [1 ]
Pessa, M. [1 ]
机构
[1] Tampere Univ Technol, Opt Elect Res Ctr, Tampere 33720, Finland
关键词
D O I
10.1049/el:20073075
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Reported is the fabrication and investigation of surface reliefs on cleaved facets of optical fibres using nanoimprint lithography. The prepared structures are diffractive elements and arrays of holes with sub-wavelength feature sizes. The results obtained indicate that nanoimprint lithography affords opportunity to miniaturise optical devices at low fabrication costs, replacing free-space optical elements.
引用
收藏
页码:150 / 152
页数:3
相关论文
共 50 条
  • [21] Fabrication of optical film derived from biomass using eco-friendly nanoimprint lithography
    Takei, Satoshi
    Murakami, Gaku
    Mori, Yuto
    Ichikawa, Takumi
    Sekiguchi, Atsushi
    Obata, Tsutomu
    Yokoyama, Yoshiyuki
    Mizuno, Wataru
    Sumioka, Junji
    Horita, Yuji
    ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXX, 2013, 8682
  • [22] Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography
    Li, MT
    Wang, JA
    Zhuang, L
    Chou, SY
    APPLIED PHYSICS LETTERS, 2000, 76 (06) : 673 - 675
  • [23] Fabrication of Nano Scale Electrode for Sensor Using Nanoimprint Lithography
    Choi, Nak-Jin
    Lee, Junghyun
    Bang, Gyeong Sook
    Lee, Hyung-Kun
    Moon, Seung Eon
    Yang, Woo Seok
    Lee, Hyoyoung
    JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2015, 10 (04) : 480 - 484
  • [24] Fabrication of concave gratings by curved surface UV-nanoimprint lithography
    Chen, Yung-Pin
    Lee, Yuet-Ping
    Chang, Jer-Haur
    Wang, Lon A.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (05): : 1690 - 1695
  • [25] Fabrication of polymer photonic crystal slabs using nanoimprint lithography
    Choi, Choon-Gi
    Kee, Chul-Sik
    Schift, Helmut
    CURRENT APPLIED PHYSICS, 2006, 6 (e8-e11) : E8 - E11
  • [26] HYBRID NANOPATTERNING USING COLLOIDAL LITHOGRAPHY AND NANOIMPRINT FOR THE FABRICATION OF NANOTEMPLATE
    Choi, Dae-Geun
    Jeong, Jun-Ho
    Lee, Eung-Sug
    INTERNATIONAL JOURNAL OF NANOSCIENCE, 2008, 7 (01) : 73 - 79
  • [27] Fabrication of linearly polarized blue LED using nanoimprint lithography
    Han, Y.-J. (yjhan@mail.tsinghua.edu.cn), 1600, Board of Optronics Lasers, No. 47 Yang-Liu-Qing Ying-Jian Road, Tian-Jin City, 300380, China (24):
  • [28] Fabrication of Gold Nanostructures on Quartz Crystal Microbalance Surface Using Nanoimprint Lithography for Sensing Applications
    Nishitsuji, Ryosuke
    Sueyoshi, Kenji
    Hisamoto, Hideaki
    Endo, Tatsuro
    MICROMACHINES, 2022, 13 (09)
  • [29] Defect tracking for nanoimprint lithography using optical surface scanner and scanning electron microscope
    Yu, Zhaoning
    Kurataka, Nobuo
    Hieu Tran
    Gauzner, Gene
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2016, 122 (09):
  • [30] Defect tracking for nanoimprint lithography using optical surface scanner and scanning electron microscope
    Zhaoning Yu
    Nobuo Kurataka
    Hieu Tran
    Gene Gauzner
    Applied Physics A, 2016, 122