Phase-shifting lateral shearing interferometer with two pairs of wedge plates

被引：37
|
作者：
Lee, HH [1 ]
You, JH [1 ]
Park, SH [1 ]
机构：
[1] Yonsei Univ, Coll Sci, Natl Res Lab Nonlinear Opt, Seoul 120749, South Korea
来源：
OPTICS LETTERS | 2003年 / 28卷 / 22期
关键词：
D O I：
10.1364/OL.28.002243
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a compact and robust phase-shifting lateral shearing interferometer that produces shearing fringes in orthogonal directions without any mechanical rotation or precise alignment. It consists of two pairs of wedge plates, a beam splitter, and a single CCD camera. Both phase-shifting and tilt for lateral shearing are achieved with two pairs of wedge plates, which can reduce systematic errors caused by external vibration and atmospheric disturbance. (C) 2003 Optical Society of America.
引用
收藏
页码：2243 / 2245
页数：3
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