Gallium nitride diffractive microlenses using in ultraviolet micro-optics system

被引：3
|
作者：
Hou, CH [1 ]
Li, MH
Chen, CC
Chang, JY
Sheu, JK
Chi, GC
Wu, C
Cheng, WT
Yeh, JH
机构：
[1] Natl Cent Univ, Inst Opt Sci, Jungli 320, Taiwan
[2] Natl Cent Univ, Dept Phys, Jungli 320, Taiwan
[3] Canyon Mat Inc, San Diego, CA 92121 USA
[4] Nanoarchitect Res Corp, Hsinchu, Taiwan
来源：
OPTICAL REVIEW | 2003年 / 10卷 / 04期
关键词：
diffractive microlens; gray-level mask; GaN; AlN; solar-blind; band-pass filter;
D O I：
10.1007/s10043-003-0287-1
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 10(2).
引用
收藏
页码：287 / 289
页数：3
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