A proposal for design of high-resolution and integrated 2-D array of ultrasound detector for Imaging purposes based on optical MEMS

In this paper design of a 2-D array of ultrasonic pressure detector for imaging purposes based on optical micro electromechanical systems (MEMS) is considered. The proposed detector includes a semiconductor plane and array of laser diodes and photodetectors around them in a specific arrangement. Semiconductor plane is deflected due to applied acoustic pressure. High resolution optical displacement sensor is used for deflection detection. A 2-D array of displacement detection is based on vertical cavity surface emitting laser diodes operation in infrared region and an array of photodetectors surrounding those. For displacement sensing operating in linear range, there is a simple relationship between displacement and acoustic pressure. High-precision pressure detection is made possible by high resolution displacement detection.