Nanoscale Imaging Using Coherent and Incoherent Laboratory Based Soft X-Ray Sources

被引：0

作者：

Stiel, H. ^{[1
,2
]}

Dehlinger, A. ^{[2
,3
]}

Janulewicz, K. A. ^{[4
]}

Jung, R. ^{[1
,2
]}

Legall, H. ^{[2
,3
]}

Pratsch, C. ^{[5
]}

Seim, C. ^{[1
,2
]}

Tuemmler, J. ^{[1
]}

机构：

[1] Max Born Inst Nichtlineare Opt & Kurzzeitspektros, Berlin, Germany

[2] Berlin Lab Innovat Xray Technol BLiX, Berlin, Germany

[3] Tech Univ Berlin, Berlin, Germany

[4] Gwangju Inst Sci & Technol, Dept Phys & Photon Sci, Gwangju, South Korea

[5] Helmholtz Zentrum Berlin, Berlin, Germany

来源：

X-RAY LASERS 2014 | 2016年 / 169卷

关键词：

TABLETOP LASER; MICROSCOPY;

D O I：

10.1007/978-3-319-19521-6_35

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nanoscale imaging of biological samples in the lab as well as mask inspection in extreme ultraviolet lithography near the production line with sub 30 nm resolution require high spectral brightness soft x-ray sources. Laser produced plasma (LPP) sources and plasma based X-ray lasers (XRL) emit soft X-ray radiation in the wavelength region of interest between 2 and 20 nm. Whereas LPP sources easily can be tuned to the so called water window (2.2-4.4 nm) the output of an XRL is restricted to relatively few fixed wavelengths in the extreme ultraviolet range. However due to the relatively high degree of coherence the XRL is well suited also for nanoscale imaging using coherent techniques like coherent diffraction imaging or Fourier transform holography.

引用

页码：267 / 273

页数：7

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