3D femtosecond laser microfabrication of photonic biochips

Three-dimensional microfabrication of photostructurable glass by femtosecond (fs) laser direct writing is demonstrated for manufacture of photonic biochips. The fs laser direct writing followed by annealing and Successive wet etching can fabricate the hollow microstructures, achieving a vareiety of microfluidic components and microoptical components in a a.,,lass chip. The optical waveguide written by the fs laser direct writing without the annealing and the successive etching can be integrated into these microfluidic and rnicrooptical circuits. Such an integrated microchip is of great use for biochemical analysis and medical inspection based on photonic sensing. Furthermore, as one of the interesting and important applications, the microchips fabricated by the present technique are applied for inspection of living microorganisms.