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Electronic properties of air-exposed GaN(1 -1 0 0) and (0 0 0 1) surfaces after several device processing compatible cleaning steps (vol 495, 143514, 2019)
被引:0
|作者:
Auzelle, T.
[1
]
Ullrich, F.
[2
,3
]
Hietzschold, S.
[2
,4
]
Brackmann, S.
[2
,4
]
Hillebrandt, S.
[2
,5
]
Kowalsky, W.
[2
,4
,5
]
Mankel, E.
[2
,3
]
Lovrincic, R.
[2
,4
]
Fernandez-Garrido, S.
[1
,6
]
机构:
[1] Leibniz Inst Forschungsverbund Berlin eV, Paul Drude Inst Festkorperelekt, Hausvogteipl 5-7, D-10117 Berlin, Germany
[2] InnovationLab, Speyerer Str 4, D-69115 Heidelberg, Germany
[3] Tech Univ Darmstadt, Mat Sci Dept, Otto Berndt Str 3, D-64287 Darmstadt, Germany
[4] Tech Univ Carolo Wilhelmina Braunschweig, Inst High Frequency Technol, Braunschweig, Germany
[5] Heidelberg Univ, Kirchhoff Inst Phys, Neuenheimer Feld 227, D-69120 Heidelberg, Germany
[6] Univ Autonoma Madrid, Dept Fis Aplicada, Grp Elect & Semicond, C Francisco Tomas y Valiente 7, Madrid 28049, Spain
关键词:
D O I:
10.1016/j.apsusc.2020.146279
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
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页数:1
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