Design, fabrication and characterization of phase masks for astronomical applications

被引：6

作者：

Massari, M. ^{[1
,2
]}

Romanato, F. ^{[1
,2
]}

Carli, M. ^{[1
,2
]}

Ongarello, T. ^{[1
,2
]}

Prasciolu, M. ^{[3
]}

Tamburini, F. ^{[4
]}

Mari, E. ^{[4
]}

Bianchini, A. ^{[4
]}

Barbieri, C. ^{[4
]}

机构：

[1] Univ Padua, Dept Phys, I-35131 Padua, Italy

[2] Lab Nanofabricat Nanodevices, I-35127 Padua, Italy

[3] INFM, IOM, I-34149 Basovizza, TS, Italy

[4] Univ Padua, Dept Astron, I-35122 Padua, Italy

来源：

MICROELECTRONIC ENGINEERING | 2011年 / 88卷 / 08期

关键词：

Electron beam lithography; Phase mask; SPP; Optical vortex coronagraphy; VORTEX CORONAGRAPH; WAVE;

D O I：

10.1016/j.mee.2011.02.048

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, a three-dimensional fabrication process was used to create a phase modulating device for astronomical applications. This phase mask, also known as spiral phase plate (SPP), finds its application in astronomy for optical vortex coronagraphy in the search of extra solar planets. SPPs are helicoidal transmission optical devices, similar to spiral staircases, that imprint vorticity onto the phase distribution of the incident light beam, changing it smoothly and continuously, while preserving the direction of the optical axis. In this paper we present a fabrication process based on electron beam lithography (EBL) and optical and topographical characterization of a nanofabricated SPP. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：2675 / 2678

页数：4

共 50 条

[31] Optical fabrication and design applications
Photonics Spectra, 1994, 28 (09)
[32] FABRICATION OF SEMITRANSPARENT MASKS
FELDSTEIN, N
WEINER, JA
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (12) : 1654 - 1657
[33] Fabrication and characterization of high-quality spiral phase plates for optical applications
Massari, M.
Ruffato, G.
Gintoli, M.
Ricci, F.
Romanato, F.
APPLIED OPTICS, 2015, 54 (13) : 4077 - 4083
[34] PYROELECTRIC EFFECT CONTROL: DESIGN, FABRICATION, AND CHARACTERIZATION OF A MICROHEATERS ARRAY FOR BIOMEDICAL APPLICATIONS
Bhowmick, S.
Leo, O.
Coppola, G.
Gioffre, M.
Musto, M.
Rotondo, G.
Iodice, M.
COMPUTATIONAL THERMAL SCIENCES, 2019, 11 (1-2): : 17 - 28
[35] Design, fabrication, and characterization of single-element interdigital transducers for NDT applications
Na, Jeong K.
Blackshire, James L.
Kuhr, Samuel
SENSORS AND ACTUATORS A-PHYSICAL, 2008, 148 (02) : 359 - 365
[36] Design, fabrication and characterization of a buckled beam actuator for micro-displacement applications
Shi, Zhichao
Bouville, David
Martincic, Emile
Moulin, Johan
Lefeuvre, Elie
Lamarque, Frederic
SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP 2019), 2019,
[37] An indium tin oxide metasurface filter for terahertz applications: Design, fabrication, and characterization
Nebioglu, Mehmet Ali
Takan, Taylan
Altan, Hakan
Demirhan, Yasemin
Alaboz, Hakan
Ozyuzer, Lutfi
Sabah, Cumali
MODERN PHYSICS LETTERS B, 2017, 31 (08):
[38] Design, fabrication, and characterization of natural fillers loaded HDPE composites for domestic applications
Ayyanar, C. Balaji
Dharshinii, M. Dhivyya
Marimuthu, K.
Akhil, S.
Mugilan, T.
Bharathiraj, C.
Rangappa, Sanjay Mavinkere
Khan, Anish
Siengchin, Suchart
POLYMER COMPOSITES, 2022, 43 (08) : 5168 - 5178
[39] Design, fabrication and characterization of a novel TSV interposer integrated inductor for RF applications
Sun, Yunheng
Jin, Yufeng
Wang, Wei
Chen, Jing
Cai, Han
Li, Jiwei
Ma, Shenglin
Hu, Liulin
He, Shuwei
Miao, Min
2018 IEEE 68TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2018), 2018, : 2492 - 2497
[40] Design, Fabrication and Characterization of an In Silico Cell Physiology lab for Bio Sensing Applications
ul Haque, A.
Rokkam, M.
De Carlo, A. R.
Wereley, S. T.
Wells, H. W.
McLamb, W. T.
Roux, S. J.
Irazoqui, P. P.
Porterfield, D. M.
INTERNATIONAL MEMS CONFERENCE 2006, 2006, 34 : 740 - 746

← 1 2 3 4 5 →