Design, fabrication and characterization of phase masks for astronomical applications

被引:6
|
作者
Massari, M. [1 ,2 ]
Romanato, F. [1 ,2 ]
Carli, M. [1 ,2 ]
Ongarello, T. [1 ,2 ]
Prasciolu, M. [3 ]
Tamburini, F. [4 ]
Mari, E. [4 ]
Bianchini, A. [4 ]
Barbieri, C. [4 ]
机构
[1] Univ Padua, Dept Phys, I-35131 Padua, Italy
[2] Lab Nanofabricat Nanodevices, I-35127 Padua, Italy
[3] INFM, IOM, I-34149 Basovizza, TS, Italy
[4] Univ Padua, Dept Astron, I-35122 Padua, Italy
关键词
Electron beam lithography; Phase mask; SPP; Optical vortex coronagraphy; VORTEX CORONAGRAPH; WAVE;
D O I
10.1016/j.mee.2011.02.048
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, a three-dimensional fabrication process was used to create a phase modulating device for astronomical applications. This phase mask, also known as spiral phase plate (SPP), finds its application in astronomy for optical vortex coronagraphy in the search of extra solar planets. SPPs are helicoidal transmission optical devices, similar to spiral staircases, that imprint vorticity onto the phase distribution of the incident light beam, changing it smoothly and continuously, while preserving the direction of the optical axis. In this paper we present a fabrication process based on electron beam lithography (EBL) and optical and topographical characterization of a nanofabricated SPP. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:2675 / 2678
页数:4
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