High frequency dielectric permittivity measurement of dielectric layer of MLCC using non-contact probe

被引：0

作者：

Kakemoto, Hirofumi ^{[1
]}

Li, Jianyong ^{[1
]}

Harigai, Takakiyo ^{[1
]}

Nam, Song-Min ^{[1
]}

Wada, Satoshi ^{[1
]}

Tsurumi, Takaaki ^{[1
]}

机构：

[1] Tokyo Inst Technol, Grad Sch Sci & Engn, 2-12-1 Ookayama, Tokyo 1528552, Japan

来源：

ELECTROCERAMICS IN JAPAN X | 2007年 / 350卷

关键词：

multi-layer ceramic capacitor; high frequency; reflection intensity; mapping; spatial resolution;

D O I：

10.4028/www.scientific.net/KEM.350.243

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Direct observations for high frequency microscopic dielectric distributions in cross sections of a multi-layer ceramic capacitor were carried out using non-contact type microwave probe. The measured data were imaged from the raw data and rounding data process. Using microwave reflection intensity mappings from cross sections of multi-layer ceramic capacitor, the dielectric permittivity distribution in micro-region of a multi-layer ceramic capacitor was measured at room temperature. The spatial resolution was experimentally estimated to be about 10 mu m from mappings of the dielectric and inner electrode layers in a multi-layer ceramic capacitor.

引用

页码：243 / +

页数：2

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