Thermo-optical properties of porous silica thin films produced by sol-gel method

被引：6

作者：

Jaglarz, Janusz ^{[1
]}

Dulian, Piotr ^{[2
]}

Karasinski, Pawel ^{[3
]}

机构：

[1] Cracow Univ Technol, Fac Mat Engn & Phys, 37 JPII St, PL-31155 Krakow, Poland

[2] Cracow Univ Technol, Fac Chem Engn & Technol, 24 Warszawska St, PL-31155 Krakow, Poland

[3] Silesian Tech Univ, Dept Optoelect, 2 B Krzywoustego St, PL-44100 Gliwice, Poland

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2020年 / 243卷 / 243期

关键词：

Sol-gel process; Thin films; Spectroscopic ellipsometry; Porous silica film; Antireflection coatings; ANTIREFLECTIVE FILMS; SURFACE-ROUGHNESS; COATINGS; TRANSMITTANCE; COEFFICIENTS; FABRICATION; TAILS; LAYER;

D O I：

10.1016/j.matchemphys.2019.122603

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work, the spectral dispersion of optical constants of porous silica thin films have been presented. To determine the optical properties of porous SiO2 films, the ellipsometer Woolam M - 2000 working in the spectral range 190-1700 nm was applied. The thermo-optical coefficients of porous SiO2 films and thermal thickness dependence in temperature range 25-300 degrees C have been determined. The porous SiO2 layers exhibited low refractive indices. The thermo-optical coefficients of presented samples were negative due to the porous structure of SiO2 films. Moreover, it has been stated that thinness has been independent of temperature. After returning to starting conditions, the refractive indices were closer to starting values which confirmed partial reversibility of the heating and cooling process of porous. The thermal properties of porous silica films have been discussed.

引用

页数：6

共 50 条

[1] Thermo-optical coefficients of sol-gel ZrO2 thin films
Elalamy, Z
Drouard, E
Mcgovern, T
Escoubas, L
Simon, JJ
Flory, F
OPTICS COMMUNICATIONS, 2004, 235 (4-6) : 365 - 372
[2] Ellipsometric and Spectrophotometric Investigations of Porous Silica Thin Films Produced by Sol-Gel Method
Skoczek, E.
Jaglarz, J.
Karasinski, P.
ACTA PHYSICA POLONICA A, 2011, 120 (04) : 732 - 735
[3] Influence of aging and annealing on the properties of silica films produced with sol-gel method
Karasinski, Pawel
OPTICA APPLICATA, 2006, 36 (2-3) : 389 - 399
[4] Optical properties of PLZT thin films fabricated by a sol-gel method
Ishii, M
Satoh, K
Kato, M
Kurihara, K
ELECTROCERAMICS IN JAPAN VII, 2004, 269 : 65 - 68
[5] Optical Properties of ZnO thin films prepared by Sol-gel method
Khelladi, Nesrine Bouchenak
Sari, Nasr Eddine Chabane
2014 NORTH AFRICAN WORKSHOP ON DIELECTRIC MATERIALS FOR PHOTOVOLTAIC SYSTEMS (NAWDMPV), 2014,
[6] Silica antireflective films on glass produced by the sol-gel method
Bautista, MC
Morales, A
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2003, 80 (02) : 217 - 225
[7] Deposition of silica thin films formed by sol-gel method
Guleryuz, Hasan
Kaus, Ingeborg
Filiatre, Claudine
Grande, Tor
Einarsrud, Mari-Ann
JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2010, 54 (02) : 249 - 257
[8] Optical thin films of metal oxides produced by the sol-gel method for photovoltaic applications
Szindler M.
Solid State Phenomena, 2019, 293 : 83 - 95
[9] Sol-gel derived porous silica films
Mezza, P
Phalippou, J
Sempere, R
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1999, 243 (01) : 75 - 79
[10] Study of Structural and Optical Properties of ZnO Thin Films Produced by Sol-Gel Methods
Chin, Huai-Shan
Chao, Long-Sun
Kao, Kuo-Sheng
SENSORS AND MATERIALS, 2016, 28 (05) : 523 - 530

← 1 2 3 4 5 →