Tribological properties of silicon nitride ceramics modified by ion implantation

被引：16
|
作者：
Nakamura, N
Hirao, K
Yamauchi, Y
机构：
[1] Fine Ceram Res Assoc, Synergy Ceram Lab, Moriyama Ku, Nagoya, Aichi 4638687, Japan
[2] Natl Inst Adv Ind Sci & Technol, Synergy Mat Res Ctr, Moriyama Ku, Nagoya, Aichi 4638687, Japan
来源：
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2004年 / 24卷 / 02期
关键词：
implantation; Si3N4; surfaces; wear parts; wear resistance;
D O I：
10.1016/S0955-2219(03)00243-7
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Surface modification by ion implantation has been carried out in order to improve the tribological properties of gas-pressure sintered silicon nitride ceramics. B+, N+, Si+ or Ti+ ions were implanted into the silicon nitride ceramics with a fluence of 2 x 10(17) ions/cm(2) at an energy of 200 keV. To evaluate the tribological properties of Si3N4, Block-on-Ring wear tests were conducted without lubricant, using the ion implanted Si3N4 as block specimens and commercially supplied Si3N4 as ring specimens. The specific wear rate of the ion-implanted Si3N4 could be drastically reduced to a value of 1.6 x 10(-9) mm(2)/N, accompanied by a decrease in the friction coefficient in the initial stage. According to surface analyses it was considered that the high wear resistance and low friction coefficient are attributed to the amorphization and the increase of surface hardness of the ion implanted layer. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码：219 / 224
页数：6
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