Precise Tracking Control for Piezo-Actuated Stage Using Inverse Compensation and Model Predictive Control

In this paper, we consider tracking control problem of piezo-actuated stage which is composed by a piezoelectric actuator (PEA) and a positioning mechanism (PM). This plant can be modeled by cascading a hysteresis with a linear dynamical system. The tracking performance of this system is significantly affected by hysteresis phenomenon of PEA. In order to improve the performance, a modified Bouc-Wen model is proposed to describe the hysteresis more accurately. Then, inverse Bouc-Wen is used to compensate hysteresis nonlinearity. Finally, model predictive control (MPC) with integral of error state variable is employed for control design. Experimental results show that the proposed method has excellent tracking performance in comparison with conventional proportional-integral (PI) controller.