Field emission characteristics of carbon nanotubes treated by plasma and laser

被引：0
|
作者：
Kim, W. S. [1 ]
Honda, T. [1 ]
Oh, C. B. [1 ]
Ohmmi, K. [1 ]
Murakami, K. [1 ]
Abo, S. [1 ]
Wakaya, F. [1 ]
Takai, M. [1 ]
机构：
[1] Osaka Univ, Res Ctr Quantum Sci & Technol Extreme Condit, Osaka 5608531, Japan
来源：
IDW '06: PROCEEDINGS OF THE 13TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3 | 2006年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An effect of Ar plasma treatment of carbon nanotube (CNT) cathodes followed by krypton fluoride (KrF) laser irradiation on field emission (FE) characteristics was investigated. With an Ar plasma treatment of 100W, the FE current density was increased to 32.6 mA/cm(2) at an electric field of 4.92 V/mu m after laser irradiation. The emission site density (ESD) of the sample with 100W plasma treatment was also increased by around 25 times than that without plasma treatment. However, the further increase in plasma power beyond 100W deteriorated both FE characteristics and ESD due to the excess plasma damage.
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页码：1841 / 1844
页数：4
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