Robust and accurate measurement of optical freeform surfaces with wavefront deformation correction

The non-null test to detect the modulated wavefront is a widely used method in optical freeform surface measurement. In this study, the wavefront deformation in the non-null test of an optical freeform surface measurement was corrected based on the wavefront propagation model to improve measurement accuracy. A freeform surface wavefront correction (FSWC) measurement system was established to validate the proposed method. Simulation and experimental studies indicated that the proposed method can reduce the influence of freeform surface wavefront deformation in space propagation. Moreover, the freeform surface form accuracy measured by FSWC can reach a root-mean-squared value of 10 nm. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement