Synthesis of nano-crystalline diamond film in hot filament chemical vapour deposition by adding Ar

被引：19
|
作者：
Zhang, YF
Zhang, F
Gao, QJ [1 ]
Yu, DP
Peng, XF
Lin, XD
机构：
[1] Peking Univ, Dept Phys, Beijing 100871, Peoples R China
[2] Beijing Inst Powder Met, Beijing 100078, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2001年 / 18卷 / 02期
关键词：
D O I：
10.1088/0256-307X/18/2/345
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Nano-crystalline diamond films are successfully deposited on silicon substrates via. the hot filament chemical vapour deposition process using a CH4/H-2/Ar gas mixture. The as-grown films are analysed by using field emission scanning electron microscopy, micro-Raman spectroscopy and x-ray diffraction. These results show that the films consist of nano-diamond grains with sizes ranging from 10 to 100 nm, and argon is an important element in the formation of nano-crystalline diamonds.
引用
收藏
页码：286 / 288
页数：3
相关论文
共 50 条
  • [41] Preparation of Nano-Crystalline Diamond Films on Poly-Crystalline Diamond Thick Films by Microwave Plasma Enhanced Chemical Vapor Deposition
    Xiong Liwei
    Wang Jianhua
    Man Weidong
    Weng Jun
    Liu Changlin
    PLASMA SCIENCE & TECHNOLOGY, 2010, 12 (03) : 310 - 313
  • [42] Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC-Co substrates
    Kadlecikova, M.
    Vojs, M.
    Breza, J.
    Vesely, M.
    Frgala, Z.
    Michalka, M.
    Matejkova, J.
    Vojackova, A.
    Danis, T.
    Marton, M.
    MICROELECTRONICS JOURNAL, 2007, 38 (01) : 20 - 23
  • [43] Structure and properties of diamond thin films grown by hot-filament chemical vapour deposition technique
    Dilawar, N
    Vankar, VD
    IETE TECHNICAL REVIEW, 1998, 15 (1-2) : 99 - 103
  • [44] Investigation of the addition of nitrogen-containing gases to a hot filament diamond chemical vapour deposition reactor
    May, PW
    Burridge, PR
    Rego, CA
    Tsang, RS
    Ashfold, MNR
    Rosser, KN
    Tanner, RE
    Cherns, D
    Vincent, R
    DIAMOND AND RELATED MATERIALS, 1996, 5 (3-5) : 354 - 358
  • [45] Structure and properties of diamond thin films grown by hot-filament chemical vapour deposition technique
    Dilawar, Nita
    Vankar, V.D.
    IETE Technical Review (Institution of Electronics and Telecommunication Engineers, India), 1998, 15 (1-2): : 99 - 103
  • [46] Preparation of Nano-Crystalline Diamond Films on Poly-Crystalline Diamond Thick Films by Microwave Plasma Enhanced Chemical Vapor Deposition
    熊礼威
    汪建华
    满卫东
    翁俊
    刘长林
    Plasma Science and Technology, 2010, 12 (03) : 310 - 313
  • [47] The deposition of oriented diamond film by hot-filament chemical vapor deposition with separate reactant gas
    G. C. Chen
    C. Sun
    R. F. Huang
    L. S. Wen
    D. Y. Jiang
    X. Z. Yao
    Journal of Materials Research, 1999, 14 : 3196 - 3199
  • [48] The influence of bias on gaseous composition and diamond growth in a hot-filament chemical vapour deposition process
    Cui, JB
    Fang, RC
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1996, 29 (11) : 2759 - 2762
  • [49] The deposition of oriented diamond film by hot-filament chemical vapor deposition with separate reactant gas
    Chen, GC
    Sun, C
    Huang, RF
    Wen, LS
    Jiang, DY
    Yao, XZ
    JOURNAL OF MATERIALS RESEARCH, 1999, 14 (08) : 3196 - 3199
  • [50] Optical and mass spectroscopy measurements of Ar/CH4/H2 microwave plasma for nano-crystalline diamond film deposition
    Zhou, Haiyang
    Watanabe, Jun
    Miyake, Masato
    Ogino, Akihisa
    Nagatsu, Masaaki
    Zhan, Rujuan
    DIAMOND AND RELATED MATERIALS, 2007, 16 (4-7) : 675 - 678
12345