Lead zirconate titanate (PZT) films deposited by a hydrothermal method

被引：9
|
作者：
Euphrasie, S
Daviero-Minaud, S
Pernod, P
机构：
[1] Ecole Cent Lille, DOAE, CNRS, UMR 8520,IEMN, F-59652 Villeneuve Dascq, France
[2] Ecole Natl Super Chim Lille, CNRS, UMR 8012, LCPS, F-59652 Villeneuve Dascq, France
来源：
SOLID STATE SCIENCES | 2003年 / 5卷 / 11-12期
关键词：
PZT film; hydrothermal; piezoelectricity;
D O I：
10.1016/j.solidstatesciences.2003.10.002
中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
We present a hydrothermal method to deposit PZT films. It uses a single-step hydrothermal process and user-friendly precursors. Pb(Zr-0.52,Ti-0.48)O-3 polycrystalline films, 5-10 mum thick, were produced in an aqueous basic solution (4M KOH) on a titanium substrate in a closed autoclave at 180 degreesC. A time-depending study to see the evolution of the films' formation is described. Some actuation testing is also presented. (C) 2003 Elsevier SAS. All rights reserved.
引用
收藏
页码：1499 / 1504
页数：6
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