Conductive Atomic Force Microscope Nanopatterning of Epitaxial Graphene on SiC(0001) in Ambient Conditions

被引：34
|
作者：
Alaboson, Justice M. P. [1 ,2 ]
Wang, Qing Hua [1 ]
Kellar, Joshua A. [1 ]
Park, Joohee [1 ]
Elam, Jeffrey W. [3 ]
Pellin, Michael J. [2 ]
Hersam, Mark C. [1 ]
机构：
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
[3] Argonne Natl Lab, Div Energy Syst, Argonne, IL 60439 USA
来源：
ADVANCED MATERIALS | 2011年 / 23卷 / 19期
基金：
美国国家科学基金会;
关键词：
SCANNED PROBE OXIDATION; HYDROGEN-PASSIVATED SILICON; FIELD-INDUCED OXIDATION; INDUCED LOCAL OXIDATION; INERT ORGANIC-SOLVENTS; GRAPHITE OXIDE; SPACE-CHARGE; KINETICS; MECHANISM; MODEL;
D O I：
10.1002/adma.201100367
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Conductive atomic force microscope (cAFM) nanopatterning is demonstrated on epitaxial graphene on SiC (0001) under ambient conditions. Nanopatterning kinetics and chemistry suggest that ambient cAFM nanopatterning induces local oxidization with the surface, interface, and bulk layers of epitaxial graphene on SiC (0001) playing distinct roles in the depth profile of the final nanopatterned structure.
引用
收藏
页码：2181 / +
页数：5
相关论文
共 50 条
  • [1] Exposure of Epitaxial Graphene on SiC(0001) to Atomic Hydrogen
    Guisinger, Nathan P.
    Rutter, Gregory M.
    Crain, Jason N.
    First, Phillip. N.
    Stroscio, Joseph A.
    NANO LETTERS, 2009, 9 (04) : 1462 - 1466
  • [2] Electronic properties of epitaxial graphene residing on SiC facets probed by conductive atomic force microscopy
    Giannazzo, F.
    Deretzis, I.
    Nicotra, G.
    Fisichella, G.
    Spinella, C.
    Roccaforte, F.
    La Magna, A.
    APPLIED SURFACE SCIENCE, 2014, 291 : 53 - 57
  • [3] Adsorption on epitaxial graphene on SiC(0001)
    Han Huang
    Andrew Thye Shen Wee
    Journal of Materials Research, 2014, 29 : 447 - 458
  • [4] Adsorption on epitaxial graphene on SiC(0001)
    Huang, Han
    Wee, Andrew Thye Shen
    JOURNAL OF MATERIALS RESEARCH, 2014, 29 (03) : 447 - 458
  • [5] The physics of epitaxial graphene on SiC(0001)
    Kageshima, H.
    Hibino, H.
    Tanabe, S.
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2012, 24 (31)
  • [6] Nucleation of Epitaxial Graphene on SiC(0001)
    Robinson, Joshua
    Weng, Xiaojun
    Trumbull, Kathleen
    Cavalero, Randall
    Wetherington, Maxwell
    Frantz, Eric
    LaBella, Michael
    Hughes, Zachary
    Fanton, Mark
    Snyder, David
    ACS NANO, 2010, 4 (01) : 153 - 158
  • [7] Atomic Structure of Epitaxial Graphene Islands on SiC(0001) Surfaces and their Magnetoelectric Effects
    Kageshima, H.
    Hibino, H.
    Nagase, M.
    Sekine, Y.
    Yamaguchi, H.
    PHYSICS OF SEMICONDUCTORS: 30TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS, 2011, 1399
  • [8] Revealing the atomic structure of the buffer layer between SiC(0001) and epitaxial graphene
    Goler, Sarah
    Coletti, Camilla
    Piazza, Vincenzo
    Pingue, Pasqualantonio
    Colangelo, Francesco
    Pellegrini, Vittorio
    Emtsev, Konstantin V.
    Forti, Stiven
    Starke, Ulrich
    Beltram, Fabio
    Heun, Stefan
    CARBON, 2013, 51 : 249 - 254
  • [9] Scanning Tunneling Microscope and Photoemission Spectroscopy Investigations of Bismuth on Epitaxial Graphene on SiC(0001)
    Huang, Han
    Wong, Swee Liang
    Wang, Yuzhan
    Sun, Jia-Tao
    Gao, Xingyu
    Wee, Andrew Thye Shen
    JOURNAL OF PHYSICAL CHEMISTRY C, 2014, 118 (43): : 24995 - 24999
  • [10] Oligo(ethylene glycol)-terminated monolayers on silicon surfaces and their nanopatterning with a conductive atomic force microscope
    QIN GuoTing & CAI ChengZhi Department of Chemistry
    Science China(Chemistry), 2010, (01) : 36 - 44
12345