RF MEMS reliability

被引：0
|
作者：
DeNatale, J [1 ]
Mihailovich, R [1 ]
机构：
[1] Rockwell Sci Co, Thousand Oaks, CA 91360 USA
来源：
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2003年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Device reliability is a key factor in the ultimate insertion of RF MEMS devices into operational systems. In particular, cycle lifetimes of contacting devices such as RF switches can be technically challenging due to the requirement of good contact electrical performance under operational stresses. This paper presents a general discussion of the reliability-limiting mechanisms that can impact RF MEMS devices, with an emphasis on the issues relevant to RF switch cycling lifetimes.
引用
收藏
页码：943 / 946
页数：4
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