Significant performance and stability improvement of low-voltage InZnO thin-film transistors by slight La doping

被引:25
|
作者
Cai, Wensi [1 ]
Li, Mengchao [1 ]
Li, Haiyun [1 ]
Qian, Qingkai [1 ]
Zang, Zhigang [1 ]
机构
[1] Chongqing Univ, Key Lab Optoelect Technol & Syst, Minist Educ, Chongqing 400044, Peoples R China
基金
中国博士后科学基金; 中国国家自然科学基金;
关键词
OXIDE GATE INSULATOR; TEMPERATURE;
D O I
10.1063/5.0100407
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low-voltage, solution-processed oxide thin-film transistors (TFTs) have shown great potential in next-generation low-power, printable electronics. However, it is now still quite challenging to obtain low-voltage oxide TFTs with both high mobility and stability, especially for solution-processed ones. In this work, La-doped InZnO (IZO:La) channel for high performance and stable TFTs is developed using a simple solution process. The effects of La composition in IZO:La on the film and TFT performance are systematically investigated. It is confirmed that the incorporation of appropriate La could control the carrier concentration, improve the surface morphology, and passivate the oxygen-related defects, leading to a reduced trap density both at dielectric/channel interface and within the channel layer. As a result, the optimized TFTs with 1% La dopants exhibit the best overall performance, including a low operating voltage of 1 V, a high mobility of 14.5 cm(2)/V s, a low subthreshold swing of 109 mV/dec, a turn-on voltage close to 0 V, and negligible changes of performance under both positive and negative bias stresses. This work might support the development of all-solution-processed oxide TFT backplanes for battery-powered active-matrix displays. Published under an exclusive license by AIP Publishing.
引用
收藏
页数:7
相关论文
共 50 条
  • [41] Improvement of device performance and instability of tungsten-doped InZnO thin-film transistor with respect to doping concentration
    Park, Hyun-Woo
    Song, AeRan
    Kwon, Sera
    Ahn, Byung Du
    Chung, Kwun-Bum
    APPLIED PHYSICS EXPRESS, 2016, 9 (11)
  • [42] Flexible, Low-Voltage and High-Performance Polymer Thin-Film Transistors and Their Application in Photo/Thermal Detectors
    Liu, Xiaotong
    Guo, Yunlong
    Ma, Yongqiang
    Chen, Huajie
    Mao, Zupan
    Wang, Hanlin
    Yu, Gui
    Liu, Yunqi
    ADVANCED MATERIALS, 2014, 26 (22) : 3631 - 3636
  • [43] Improvement of air stability on solution-processed InZnO thin-film transistors by microwave irradiation and In:Zn composition ratio
    Park, Junghoon
    Ha, Tae-Jun
    Cho, Won-Ju
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2015, 212 (08): : 1719 - 1724
  • [44] Effect of interfacial InZnO conducting layer on electrical performance and bias stress stability of InAlZnO thin-film transistors
    Woo, Kyoungwan
    Lee, Se Hyeong
    Lee, Sanghyun
    Bak, So-Young
    Kim, Yoo-Jong
    Yi, Moonsuk
    MICROELECTRONIC ENGINEERING, 2019, 215
  • [45] Improvement in Bias Stress Stability of Solution-Processed Amorphous InZnO Thin-Film Transistors via Low-Temperature Photosensitive Passivation
    Safaruddin, Aimi Syairah
    Bermundo, Juan Paolo Soria
    Yoshida, Naofumi
    Nonaka, Toshiaki
    Fujii, Mami N.
    Ishikawa, Yasuaki
    Uraoka, Yukiharu
    IEEE ELECTRON DEVICE LETTERS, 2020, 41 (09) : 1372 - 1375
  • [46] Improvement in interfacial characteristics of low-voltage carbon nanotube thin-film transistors with solution-processed boron nitride thin films
    Jeon, Jun-Young
    Ha, Tae-Jun
    APPLIED SURFACE SCIENCE, 2017, 413 : 118 - 122
  • [47] Flexible low-voltage organic thin-film transistors with low contact resistance and high transit frequencies
    Borchert, James W.
    Zschieschang, Ute
    Letzkus, Florian
    Giorgio, Michele
    Caironi, Mario
    Burghartz, Joachim N.
    Ludwigs, Sabine
    Klauk, Hagen
    2019 TWENTY-SIXTH INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD): TFT TECHNOLOGIES AND FPD MATERIALS, 2019,
  • [48] LOW-VOLTAGE AC THIN-FILM ELECTROLUMINESCENT DEVICES
    KOZAWAGUCHI, H
    OHWAKI, J
    TSUJIYAMA, B
    MURASE, K
    PROCEEDINGS OF THE SID, 1982, 23 (03): : 181 - 186
  • [49] LOW-VOLTAGE MAGNETRON DISCHARGES FOR THIN-FILM PREPARATION
    STEENBECK, K
    STEINBEISS, E
    WINKLER, S
    SCHMIDT, G
    BRUCHLOS, G
    VACUUM, 1991, 42 (1-2) : 39 - 41
  • [50] Effect of oxygen defect on the performance of Nd: InZnO high mobility thin-film transistors
    Li, Yilin
    Zeng, Xuan
    Ye, Qiannan
    Yao, Rihui
    Zhong, Jinyao
    Fu, Xiao
    Yang, Yuexin
    Li, Muyun
    Ning, Honglong
    Peng, Junbiao
    SURFACES AND INTERFACES, 2022, 33