Optical constants of Al-doped Er2O3 films prepared by radio frequency reactive magnetron sputtering

被引：0
|
作者：
Zhu, Yan-Yan [1 ]
Fang, Ze-Bo [2 ]
机构：
[1] Shanghai Univ Elect Power, Shanghai 200090, Peoples R China
[2] Shaoxing Univ, Dept Phys, Shaoxing 312000, Peoples R China
来源：
OPTOELECTRONIC MATERIALS, PTS 1AND 2 | 2010年 / 663-665卷
关键词：
Rare earth oxide; Optical constants; Solar power; EMITTERS;
D O I：
10.4028/www.scientific.net/MSF.663-665.361
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Al doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron technique. X-ray diffraction and atomic force microscopy show the Al doped Er2O3 films obtained are amorphous and uniform. The optical constants are studied which shows a proper value of refractive index and a lower reflectivity, indicating it could be a usefully material for solar cells.
引用
收藏
页码：361 / +
页数：2
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