2-d imaging of temperature in CF4 plasmas

被引:1
|
作者
Steffens, KL [1 ]
Sobolewski, MA [1 ]
机构
[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
关键词
fluorocarbon; imaging optical spectroscopy; planar laser-induced fluorescence (PLIF); plasmas; temperature;
D O I
10.1109/TPS.2005.845310
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Two-dimensional maps of rotational temperature were determined in CF4 plasmas using planar laser-induced fluorescence of CF. Experiments were performed in a capacitively-coupled, parallel plate plasma reactor at pressures from 26.7 Pa (200 mtorr) to 107 Pa (800 mtorr) and powers of 10-30 W. Temperatures, which ranged from 273 K +/- 15 K to 480 K +/- 15 K, increased with pressure and power and were fairly axially symmetric with radial gradients. Temperature gradients, such as those observed here, can have a strong impact on density measurements that probe a single rotational level, as well as on reaction rate constants and interpretation of density gradients.
引用
收藏
页码:370 / 371
页数:2
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