Micromachining of 2D-3D structures with high intensity laser pulses

Nowadays MEMS, fluidic devices, advanced sensors, biomedical devices and instruments etc. are important applications for strategic sectors. These are demanding suitable tools for materials processing, especially for developing tasks in different kind of materials and geometries around the micron, since this dimensional range emerged at the crossroad of nanotechnologies and conventional fabrication techniques. Specific laser based machines for each process of interest (initially working only in 2D) were rapidly developed, and an important gap has been generated, from the fabrication point of view, in targeting fully 3D applications. This paper briefly describes the design and notable applications of a multi-axis laser micromachining workstation based on the main concept of flexibility that was developed at the UPM Laser Centre of the Polytechnical University of Madrid (Universidad Politecnica de Madrid). This system integrates an advanced 6-axis positioning system and two UV laser sources, excimer and DPSS working in nanoseconds pulse regime, for precision 3D micro-machining of complex parts. A short description of the most relevant features of this micro-manufacturing cell is provided. Advanced materials (including composites) were machined at a dimensional range of microns for the processed zones. The main issues overcame by the authors in generation of 2D/3D structures by high intensity laser pulses with direct incidence are briefly described. Several examples of the applications achieved with this system, including processing of advanced sensors, organic materials for biomedical devices and metallic materials for important industrial sectors are presented.