HIGH-ENERGY-DENSITY ON-CHIP SUPERCAPACITORS USING MANGANESE DIOXIDE-DECORATED DIRECT-PROTOTYPED POROUS CARBON ELECTRODES

被引：0

作者：

Li, Siwei ^{[1
]}

Wang, Xiaohong ^{[1
,2
]}

Shen, Caiwei ^{[1
]}

机构：

[1] Tsinghua Univ, Inst Microelect, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China

[2] Chinese Acad Sci, State Key Labs Transducer Technol, Beijing 100864, Peoples R China

来源：

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2014年

关键词：

ARRAYS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High performance on-chip micro supercapacitors are presented, using manganese dioxide (MnO2) decorated into direct prototyped porous carbon electrodes. By incorporating MnO2 into carbon framework, both electric double layer capacitance (EDLC) and pseudocapacitance contribute to total capacity. The configuration is realized by combination of nano template into photolithography technology, carbonization, removing the template to form patterned porous carbon network, and designed electrochemical deposition process to grow MnO2 in the carbon framework. The capacitance of the composite increases compared with pure porous carbon without obvious decay in cycle life. Then the on-chip prototypes using the composite as electrode material are designed and the volumetric capacitance of 2.9mF/(cm(2) mu m) under the scan rate of 50mV/s is much higher than 0.8mF/(cm(2) mu m) of carbon.

引用

页码：405 / 408

页数：4