Roll-to-roll sputtering of indium tin oxide layers onto ultrathin flexible glass

被引：11

作者：

Fahland, Matthias ^{[1
]}

Zywitzki, Olaf ^{[1
]}

Modes, Thomas ^{[1
]}

Vondkar, Komal ^{[1
]}

Werner, Torsten ^{[1
]}

Ottermann, Clemens ^{[2
]}

Berendt, Markus ^{[3
]}

Pollack, Gerd ^{[3
]}

机构：

[1] Fraunhofer Inst Organ Elect, Electron Beam & Plasma Technol, Winterbergstr 28, D-01277 Dresden, Germany

[2] Schott AG, Hattenbergstr 10, D-55122 Mainz, Germany

[3] Von ARDENNE GmbH, Hahnweg 8, D-01328 Dresden, Germany

来源：

THIN SOLID FILMS | 2019年 / 669卷

关键词：

FILMS;

D O I：

10.1016/j.tsf.2018.10.032

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ultrathin flexible glass is a material with fascinating properties. However, the handling of the glass as well as the reliable and cost effective deposition of coatings onto its surface are decisive for creating attractive application cases. Indium-tin-oxide coatings were deposited onto the glass in a specially designed roll-to- roll coating machine. The substrate was heated while it was moved through the deposition zone. The minimum sheet resistance and the resistivity of these layers were 11 Omega(squ) and 1.5 x 10(-4) Omega cm, respectively. The surface topography of the samples was investigated by scanning electron microscopy and atomic force microscopy. The measurement revealed that the roughness of the samples shows a minimum for substrate temperatures of 190 degrees C during the deposition.

引用

页码：56 / 59

页数：4

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