Plasma-free dry-chemical texturing process for high-efficiency multicrystalline silicon solar cells

被引：18

作者：

Kafle, Bishal ^{[1
]}

Freund, Timo ^{[1
]}

Mannan, Abdul ^{[1
]}

Clochard, Laurent ^{[2
]}

Duffy, Edward ^{[2
]}

Werner, Sabrina ^{[1
]}

Saint-Cast, Pierre ^{[1
]}

Hofmann, Marc ^{[1
]}

Rentsch, Jochen ^{[1
]}

Preu, Ralf ^{[1
]}

机构：

[1] Fraunhofer ISE, Heidenhofstr 2, D-79100 Freiburg, Germany

[2] Nines Photovolta, IT Tallaght, Dublin 24, Ireland

来源：

PROCEEDINGS OF THE 6TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2016) | 2016年 / 92卷

关键词：

black silicon; atmospheric pressure; dry texturing; silicon nitride; surface passivation; emitter recombination; ATOMIC-LAYER DEPOSITION; BLACK SILICON; CONVERSION EFFICIENCY; CRYSTALLINE SILICON; PASSIVATION; J(0)-ANALYSIS; SURFACE;

D O I：

10.1016/j.egypro.2016.07.113

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

In this paper, we study the influence of modifying the geometry of nanotexture on its electrical properties. Nanotexture is formed by an industrially feasible dry-chemical etching process performed entirely in atmospheric pressure conditions. A surface modification process is developed that allows low surface recombination velocities (S-eff,S-min <= 10 cm/s) on nanotextured surfaces. By simultaneously improving the surface passivation and the emitter diffusion processes, we achieve an equivalent passivation level (V-OC,V-impl >= 670 mV) for nanotextured surfaces to that of reference textured surfaces after applying either PECVD or ALD based deposition techniques. (C) 2016 The Authors. Published by Elsevier Ltd.

引用

页码：359 / 368

页数：10

共 50 条

[41] High-Efficiency 6" Multicrystalline Black Solar Cells Based on Metal-Nanoparticle-Assisted Chemical Etching
Hsu, W. Chuck
Lu, Yen-Sheng
Chyan, Jung-Yi
Yeh, J. Andrew
INTERNATIONAL JOURNAL OF PHOTOENERGY, 2012, 2012
[42] High-efficiency silicon heterojunction solar cells by HWCVD
Wang, T. H.
Iwaniczko, E.
Page, M. R.
Wang, Qi
Xu, Y.
Yan, Y.
Levi, D.
Roybal, L.
Bauer, R.
Branz, H. M.
CONFERENCE RECORD OF THE 2006 IEEE 4TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, VOLS 1 AND 2, 2006, : 1439 - +
[43] New concepts for high-efficiency silicon solar cells
Glunz, S. W.
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2006, 90 (18-19) : 3276 - 3284
[44] High-efficiency amorphous and "micromorph" silicon solar cells
Meier, J
Spitznagel, J
Kroll, U
Bucher, C
Faÿ, S
Moriarty, T
Shah, A
PROCEEDINGS OF 3RD WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION, VOLS A-C, 2003, : 2801 - 2805
[45] Progress in manufacturable high-efficiency silicon solar cells
Hezel, R
ADVANCES IN SOLID STATE PHYSICS 44, 2004, 44 : 39 - 49
[46] ANALYSIS OF HIGH-EFFICIENCY SILICON SOLAR-CELLS
WEAVER, HT
NASBY, RD
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (05) : 465 - 472
[47] CHARACTERIZATION OF HIGH-EFFICIENCY SILICON SOLAR-CELLS
GREEN, MA
BLAKERS, AW
OSTERWALD, CR
JOURNAL OF APPLIED PHYSICS, 1985, 58 (11) : 4402 - 4408
[48] Development of high-efficiency silicon solar cells for commercialization
Lee, SH
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2001, 39 (02) : 369 - 373
[49] Analysis of ultrathin high-efficiency silicon solar cells
Kray, Daniel
McIntosh, Keith R.
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (07): : 1647 - 1654
[50] High-efficiency polycrystalline silicon film solar cells
Elgamel, HEA
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1998, 53 (3-4) : 269 - 275

← 1 2 3 4 5 →