Reconfigurable near-infrared optical filter with a micromechanical diffractive Fresnel lens

被引：7
|
作者：
Lacolle, M [1 ]
Sagberg, H
Johansen, IR
Lovhaugen, O
Solgaard, O
Sudbo, AS
机构：
[1] Univ Oslo, Dept Phys, N-0371 Oslo, Norway
[2] SINTEF Elect & Cybernet, N-0314 Oslo, Norway
[3] Stanford Univ, Stanford, CA 94305 USA
[4] Univ Oslo, Univ Grad Ctr UniK, N-2027 Kjeller, Norway
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 12期
关键词：
focusing; gratings; microelectromechanical devices; optical diffraction; optical filters; spectroscopy;
D O I：
10.1109/LPT.2005.859186
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have fabricated and characterized a micromechanical Fresnel lens that serves as a reconfigurable filter for near-infrared spectrometry, for the analysis of gas, liquids, or solids. The lens consists of silicon segments that can be individually actuated. Moving the segments vertically controls the spectrum of the light that is focused on a detector. The holographic pattern on top of the segments permits both focusing of the light and spectral control. We have demonstrated experimentally the desired spectral control of the filter.
引用
收藏
页码：2622 / 2624
页数：3
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