Multidimensional ZnO nanodot arrays by self-ordering on functionalised substrates

被引：0

作者：

Kim, SW ^{[1
]}

Ueda, M ^{[1
]}

Kotani, T ^{[1
]}

Fujita, S ^{[1
]}

机构：

[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan

来源：

11TH INTERNATIONAL CONFERENCE ON II-VI COMPOUNDS (II-VI 2003), PROCEEDINGS | 2004年 / 1卷 / 04期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Highly ordered one- and two-dimensional ZnO nanodot arrays were realized by self-ordering on focused ion beam (FIB)-functionalised SiO2/Si substrates. Metalorganic chemical vapor deposition was used to deposit zero-dimensional ZnO nanostructures on nanopatterns acting as artificial traps for Zn adatoms. The quality of the multidimensional nanodot arrays depends on the FIB-introduced nanopattern morphologies and MOCVD growth conditions. Energy-dispersive X-ray measurements showed that Ga atoms incorporated in patterned areas during FIB-engraving play an important role for the initial nucleation of ZnO nanodots. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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页码：896 / 899

页数：4

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