Multidimensional ZnO nanodot arrays by self-ordering on functionalised substrates

被引：0
|
作者：
Kim, SW [1 ]
Ueda, M [1 ]
Kotani, T [1 ]
Fujita, S [1 ]
Fujita, S [1 ]
机构：
[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan
来源：
11TH INTERNATIONAL CONFERENCE ON II-VI COMPOUNDS (II-VI 2003), PROCEEDINGS | 2004年 / 1卷 / 04期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Highly ordered one- and two-dimensional ZnO nanodot arrays were realized by self-ordering on focused ion beam (FIB)-functionalised SiO2/Si substrates. Metalorganic chemical vapor deposition was used to deposit zero-dimensional ZnO nanostructures on nanopatterns acting as artificial traps for Zn adatoms. The quality of the multidimensional nanodot arrays depends on the FIB-introduced nanopattern morphologies and MOCVD growth conditions. Energy-dispersive X-ray measurements showed that Ga atoms incorporated in patterned areas during FIB-engraving play an important role for the initial nucleation of ZnO nanodots. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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页码：896 / 899
页数：4
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