Nonlinear model reduction for simulation and control of Rapid Thermal Processing

被引：0
|
作者：
Aling, H
Banerjee, S
Bangia, AK
Cole, V
Ebert, J
EmamiNaeini, A
Jensen, KF
Kevrekidis, IG
Shvartsman, S
机构：
来源：
PROCEEDINGS OF THE 1997 AMERICAN CONTROL CONFERENCE, VOLS 1-6 | 1997年
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D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A methodology (based on the Proper Orthogonal Decomposition and Approximate Inertial Manifolds) is proposed for obtaining low order dynamic models of Rapid Thermal Processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers.
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收藏
页码：2233 / 2238
页数：6
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