A succinct design method of soft x-ray multi-layer mirror

In order to acquire high reflectance, how to select the thickness d(H) and d(L) of the high and low atomic numbers materials should be considered first of all in the design of soft x-ray multi-layer. This paper introduced a simple design method based on matrix method. In the design process of a multi-layer mirror using Mo/Si at lambda =13.1nm and normal incidence, its reflectance reaches 67.0% when layers are 30. Compared with other method, although its reflectance is a bit lower, it is a simple and practical method.