Effects of plasma parameters on the properties of La1-xSrxMnO3 thin layers deposited in low-pressure RF plasma wave shock reactor

被引：4
|
作者：
Nikravech, M [1 ]
Rousseau, F [1 ]
Morvan, D [1 ]
Amouroux, J [1 ]
机构：
[1] Univ Paris 06, Ecole Natl Super Chim, Lab Genie Procedes Plasmas & Traitement Surfaces, F-75005 Paris, France
来源：
HIGH TEMPERATURE MATERIAL PROCESSES | 2003年 / 7卷 / 02期
关键词：
low pressure plasma; SOFC; fuel cell; cathode;
D O I：
10.1615/HighTempMatProc.v7.i2.120
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Deposits of La1-xSrxMnO3+/-delta used as cathode materials in solid oxide fuel cells are obtained by oxidation of nitrate precursors in a low pressure RF plasma reactor equipped with a convergent nozzle. Impedance measurements showed the role of plasma parameters on the electrical conductivity of deposits. Infrared analysis of deposits permitted to measure the role of plasma parameters on the conversion rate of nitrate precursors. Oxygen and hydroxyl radicals produced by plasma are found to be the major reactive species that lead to the oxidation of nitrate precursors in this process.
引用
收藏
页码：225 / 230
页数：6
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