Identification of iron and nickel in 6H-SiC by electron paramagnetic resonance

被引：5
|
作者：
Baranov, PG [1 ]
Ilyin, IV [1 ]
Mokhov, EN [1 ]
Khramtsov, VA [1 ]
机构：
[1] Russian Acad Sci, AF Ioffe Physicotech Inst, RU-194021 St Petersburg, Russia
来源：
SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000 | 2001年 / 353-356卷
关键词：
electron paramagnetic resonance; iron; nickel; semi-insulating layers;
D O I：
10.4028/www.scientific.net/MSF.353-356.529
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report on the first observation of electron paramagnetic resonance of iron and photo-EPR of nickel impurities in 6H-SiC crystals. Iron exists in Fe3+ (3d(5)) charge state with electron spin, S = 3/2. Nickel exists in Ni3+ (3d(7)) charge state with electron spin S = 3/2. Both impurities seem to occupy silicon sites in the 6H-SiC lattice. Possibility of using iron doping to obtain semi-insulating SiC crystals is discussed.
引用
收藏
页码：529 / 532
页数：4
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