Nanoimprint lithography based approach for the fabrication of large-area, uniformly oriented plasmonic arrays

被引:107
|
作者
Lucas, Brandon D. [2 ]
Kim, Jin-Sung [1 ]
Chin, Christine [3 ]
Guo, L. Jay [1 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Solid State Elect Lab, Ann Arbor, MI 48109 USA
[2] Univ Michigan Appl Phys, Ann Arbor, MI 48109 USA
[3] MIT, Dept Mech Engn, Cambridge, MA 02139 USA
关键词
D O I
10.1002/adma.200700225
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Large-area, uniformly oriented plasmonic arrays are fabricated using nanoimprint lithography. Excellent control of the Localized Surface Plasmon Resonance of the metallic arrays is demonstrated through nanoparticle material composition, size characteristics and polarization effects. This method offers a promising fabrication alternative to exploit LSPR-based applications such as biosensing and surface-enhanced spectroscopies.
引用
下载
收藏
页码:1129 / +
页数:7
相关论文
共 50 条
  • [21] Large-area Metal Grid Ultraviolet Filter Fabricated by Nanoimprint Lithography
    Li, Wen-Di
    Chou, Stephen Y.
    2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 1219 - 1220
  • [22] Positional accuracy of an alignment stage for a large-area UV Nanoimprint lithography
    Lee, Jinyoung
    Won, Chongjin
    Jeong, Jay I.
    WORLD CONGRESS ON ENGINEERING 2008, VOLS I-II, 2008, : 1342 - +
  • [23] Lithography-free fabrication of large-area plasmonic nanostructures using colloidal gold nanoparticles
    Liu, Hongmei
    Zhang, Xinping
    Gao, Zhihua
    PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS, 2010, 8 (03) : 131 - 139
  • [24] Fabrication of large-area nickel nanobump arrays
    Chen, X.
    Wei, X.
    Jiang, K.
    MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) : 871 - 873
  • [25] Inherently Reproducible Fabrication of Plasmonic Nanoparticle Arrays for SERS by Combining Nanoimprint and Copolymer Lithography
    Krishnamoorthy, Sivashankar
    Krishnan, Sathiyamoorthy
    Thoniyot, Praveen
    Low, Hong Yee
    ACS APPLIED MATERIALS & INTERFACES, 2011, 3 (04) : 1033 - 1040
  • [26] Large-Area Zone Plate Fabrication with Optical Lithography
    Denbeaux, G.
    10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2011, 1365 : 73 - 76
  • [27] Nanoimprint lithography for the fabrication of interdigitated cantilever arrays
    Luo, Gang
    Maximov, Ivan
    Adolph, David
    Graczyk, Mariusz
    Carlberg, Patrick
    Ghatnekar-Nilsson, Sara
    Hessman, Dan
    Zhu, Tao
    Liu, Zhongfan
    Xu, H. Q.
    Montelius, Lars
    NANOTECHNOLOGY, 2006, 17 (08) : 1906 - 1910
  • [28] Large-Area Fabrication of Patterned ZnO-Nanowire Arrays Using Light Stamping Lithography
    Hwang, Jae K.
    Cho, Sangho
    Seo, Eun K.
    Myoung, Jae M.
    Sung, Myung M.
    ACS APPLIED MATERIALS & INTERFACES, 2009, 1 (12) : 2843 - 2847
  • [29] Fabrication of large-area metal and semiconductor nanobridge arrays using nanotransfer printing and UV lithography
    Seleznev, V. A.
    Tumashev, V. S.
    Yamaguchi, H.
    Prinz, V. Ya.
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2023, 82 : 316 - 323
  • [30] Large-Area Fabrication of Highly Tunable Hybrid Plasmonic-Photonic Structures Based on Colloidal Lithography and a Photoreconfigurable Polymer
    Wang, Shiqiang
    Dong, Hao
    Sun, Fuwei
    Zhang, Wanlin
    Liang, Yun
    Tian, Li
    Wang, Peng
    Yin, Xianpeng
    Li, Guangtao
    ADVANCED OPTICAL MATERIALS, 2019, 7 (19):