Influence of impurity gas in the sputtering atmosphere on the microstructure and the GMR in Co/Cu multilayers

被引：6

作者：

Miura, S ^{[1
]}

Takahashi, D ^{[1
]}

Tsunoda, M ^{[1
]}

Takahashi, M ^{[1
]}

机构：

[1] Tohoku Univ, Dept Elect Engn, Sendai, Miyagi 98077, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1998年 / 34卷 / 04期

关键词：

D O I：

10.1109/20.706319

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The influence of impurity gas in the sputtering atmosphere on the microstructure and the GMR was investigated on Co/Cu multilayers. The MR ratio increased from 12 % to 27 %, when the chamber pressure, Pb before introducing Ar was changed from 5x10(-8) Torr to 2x10(-5) Torr by leaking air. From structural analysis, the multilayer fabricated with P-b=2x10(-5) Torr has a small grain diameter and a relatively fiat stacking structure. Co layers in the multilayer fabricated under highly purified atmosphere and excessively contaminated atmosphere, behaved as particulste in lower temperature.

引用

页码：936 / 938

页数：3

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