Various characteristic of Carbon nanotubes film methane Gas sensor

被引：1
|
作者：
Li, Xin [1 ]
Liu, Junhua [1 ]
Zhu, Changchun [1 ]
机构：
[1] Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian 710049, Peoples R China
来源：
2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3 | 2006年
基金：
中国国家自然科学基金;
关键词：
carbon nanotube; gas sensor; neural network; methane;
D O I：
10.1109/NEMS.2006.334805
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Various sensing characteristic of Carbon nanotube synthesized by low press chemical vapor deposit (LPCVD) method have been studied. The composite sensing film of silicon dioxide and multi-wall nanotubes (SiO2-MWNTs) is sensitive to methane. The various characteristic such as sensitivity, repeatability, reliability and cross-sensitivity Of SiO2-NfWNTs composite film gas sensor have been studied. Having been tested in methane 3 times, the sensor keeps the sensitivity steady, which means the sensor has a good repeatability. In concentration recognizing, the temperature is a interfere factor and always lead to error result. It is eliminated using neural network (NN) recognized system.
引用
收藏
页码：1453 / +
页数：2
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