Improvement of porous polysilicon nano-structured emitter for vacuum packaged devices

被引：3

作者：

Lee, JW

Paek, KK

Jang, J

Ju, BK

机构：

[1] Korea Univ, Dept Elect Engn, Seoul 136701, South Korea

[2] Korea Inst Sci & Technol, Microsyst Res Ctr, Display & Nanodevices Lab, Seoul 136791, South Korea

[3] Daejin Univ, Dept Elect Engn, Pochon 487711, Gyeonggi Do, South Korea

[4] Kyung Hee Univ, Dept Phys, Seoul 130701, South Korea

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2005年 / 16卷 / 03期

关键词：

D O I：

10.1007/s10854-005-6589-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Porous polysilicon (PPS) emitters were fabricated by depositing an Au thin film on a thermally oxidized polysilicon and their emission properties were examined. The emission properties were also measured for the emitters with various Au thicknesses and the vacuum packaged devices were then developed. The experimental results show that the electrical performances of PPS emitters decreased, because high-temperature packaging process will lead to thermally induced phenomenon between thin layers. We have carried out optimal-thickness variation in Au thickness to improve electron emission properties of PPS emitters packaged. When PPS emitters packaged was driven directly, the field-induced electron emission through anode phosphor was observed. (C) 2005 Springer Science + Business Media, Inc.

引用

页码：125 / 130

页数：6

共 50 条

[31] Capillary Characteristic Investigation of Porous Nano-Structured Stainless Steel Wire Mesh
Guo K.
Wang C.
Zhang D.
Qiu S.
Su G.
Tian W.
[J]. Hedongli Gongcheng/Nuclear Power Engineering, 2021, 42 : 58 - 62
[32] Fabrication of nano-structured porous PLLA scaffold intended for nerve tissue engineering
Yang, F
Murugan, R
Ramakrishna, S
Wang, X
Ma, YX
Wang, S
[J]. BIOMATERIALS, 2004, 25 (10) : 1891 - 1900
[33] Modelling of the conductive heat transfer through nano-structured porous silica materials
Coquard, R.
Baillis, D.
Grigorova, V.
Enguehard, F.
Quenard, D.
Levitz, P.
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2013, 363 : 103 - 115
[34] Porous Nano-Structured GeO2 for High Performance Lithium Storage
Song, Haizeng
Zhao, Bin
Yan, Shancheng
Li, Keyu
Xu, Xin
Shi, Yi
[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2017, 17 (12) : 9036 - 9041
[35] Photoelectrochemical Studies on the Electrode of Nano-structured TiO2 Porous Film
Liu Minsheng
Hao Yanzhong
Yu Chen
Yang Maizhi
Cai Shengmin
[J]. ACTA PHYSICO-CHIMICA SINICA, 1997, 13 (11) : 992 - 998
[36] Electrochemical preparation of micro/nano-structured porous ZnO films and their photocatalytic activity
Zhejiang Key Laboratory for Chemistry on Solid Surfaces, Institute of Physical Chemistry, Zhejiang Normal University, Jinhua 321004, China
不详
[J]. Zhongguo Youse Jinshu Xuebao, 2009, 9 (1649-1657):
[37] Manufacturing of Functional Micro- and Nano-structured Plastic Components and Silicon Devices
Blondiaux, N.
Zhurminsky, I.
Klein, M. J. K.
Montagne, F.
Franc, G.
Heinzelmann, H.
Brugger, J.
Pugin, R.
[J]. PROCEEDINGS OF THE 8TH INTERNATIONAL CONFERENCE ON MULTI-MATERIAL MICRO MANUFACTURE (4M 2011), 2011, : 331 - 335
[38] Fabrication of protonic conductors with nano-structured surface by porous alumina membrane mask
Yugami, H
Yoneta, I
Sai, H
[J]. SOLID STATE IONICS, 2002, 154 : 693 - 697
[39] Electrical and mechanical properties of nano-structured TiN coatings deposited by vacuum cold spray
Wang, Y. -Y.
Liu, Y.
Li, C. -J.
Yang, G. -J.
Kusumoto, K.
[J]. VACUUM, 2012, 86 (07) : 953 - 959
[40] Renewable nano-structured coatings on medical devices prevent the transmission of clinically relevant pathogens
Lukowski, G.
Weihe, T.
Koehnlein, J.
Schlueter, R.
Schultze, N.
Quade, A.
Wendler, C.
Rackow, K.
Dittrich, A.
Werner, S.
Ehlbeck, J.
Weltmann, K. -D.
[J]. SURFACE & COATINGS TECHNOLOGY, 2019, 366 : 227 - 237

← 1 2 3 4 5 →