Comb IDE Patterned Piezoelectric MEMS Cantilever for Sensing Applications

被引：0
|
作者：
Mukhija, Neha [1 ]
Paliwal, Nidhi [1 ]
Bhatia, Deepak [1 ]
机构：
[1] Rajasthan Tech Univ, Dept Elect Engn, Kota 324010, India
来源：
2015 4TH INTERNATIONAL CONFERENCE ON RELIABILITY, INFOCOM TECHNOLOGIES AND OPTIMIZATION (ICRITO) (TRENDS AND FUTURE DIRECTIONS) | 2015年
关键词：
IDE; bow control; PZT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Power scavenging is a method of extracting energy from the surrounding and converting it into electrical energy. In this paper two element array of dimensions 30x4 mu m(2) with IDE pattern on top is proposed. An insulation layer of SiO2 is sandwiched in between Si and PZT layer. This layer provides the bow control of cantilever beam. Cantilever array is simulated using COMSOL multiphysics. The effect of various parameters on the performance of cantilever beam is studied. Effect of thickness of PZT layer and length of the cantilever on displacement and stress generated across the cantilever is studied.
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页数：4
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