Using the temperature dependence of resonator quality factor as a thermometer

被引：55
|
作者：
Hopcroft, M. A. [1 ]
Kim, B.
Chandorkar, S.
Melamud, R.
Agarwal, M.
Jha, C. M.
Bahl, G.
Salvia, J.
Mehta, H.
Lee, H. K.
Candler, R. N.
Kenny, T. W.
机构：
[1] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA
[2] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
来源：
APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 01期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.2753758
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Silicon micromechanical resonators have been designed to have a quality factor (Q) that is a strong function of temperature. This is an ideal sensor for the temperature of the resonator-it is instantaneous, consumes no power, and indicates the temperature of the resonator structure with high sensitivity. The authors present a practical implementation of an oscillator system using these resonators with a temperature resolution of better than 0.002 degrees C. The Q(T) signal is uniquely suited for implementing feedback control of the resonator temperature, thereby stabilizing the frequency silicon micromechanical resonators and enabling their use in high-stability frequency reference applications. (C) 2007 American Institute of Physics.
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页数：3
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