Processing of amorphous silicon flat panel displays with large-area excimer lasers

被引：0
|
作者：
Stehle, M
Godard, B
Stehle, JL
机构：
来源：
GAS AND CHEMICAL LASERS AND APPLICATIONS II | 1997年 / 2987卷
关键词：
excimer laser; annealing; AMLCD; poly-Si-TFT;
D O I：
10.1117/12.271551
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Historical background and present status of excimer laser annealing of amorphous silicon for poly-TFTs fabrication are presented. Scanning and single shot systems are compared both on the physical and economical aspects. Process optimisation and process control using real time spectroscopic ellipsometry are also presented. Finally, some perspectives in the development of very high power excimer laser are also given.
引用
收藏
页码：74 / 79
页数：6
相关论文
共 50 条
  • [31] Excimer lasers anneal flat-panel components
    Prat, C
    Zahorski, D
    Stehlé, M
    LASER FOCUS WORLD, 1999, 35 (07): : 131 - +
  • [32] Amorphous silicon: Vehicle and test bed for large-area electronics
    Wagner, Sigurd
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2010, 207 (03): : 501 - 509
  • [33] AMORPHOUS-SILICON ARRAYS PROMISE LARGE-AREA IMAGERS
    GALLAGHER, PK
    LASER FOCUS WORLD, 1995, 31 (05): : 171 - &
  • [34] Hybrid amorphous and polycrystalline silicon devices for large-area electronics
    Mei, P
    Boyce, JB
    Fork, DK
    Anderson, G
    Ho, J
    Lu, J
    Hack, M
    Lujan, R
    AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY-1998, 1998, 507 : 3 - 12
  • [35] Progress in amorphous silicon based large-area multijunction modules
    Carlson, DE
    Arya, RR
    Bennett, M
    Chen, LF
    Jansen, K
    Li, YM
    Maley, N
    Morris, J
    Newton, J
    Oswald, RS
    Rajan, K
    Vezzetti, D
    Willing, F
    Yang, L
    13TH NREL PHOTOVOLTAICS PROGRAM REVIEW, 1996, (353): : 304 - 311
  • [36] Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing
    Kim, K.N.
    Jung, S.J.
    Lee, Y.J.
    Yeom, G.Y.
    Lee, S.H.
    Lee, J.K.
    Journal of Applied Physics, 2005, 97 (06):
  • [37] Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing
    Kim, KN
    Jung, SJ
    Lee, YJ
    Yeom, GY
    Lee, SH
    Lee, JK
    JOURNAL OF APPLIED PHYSICS, 2005, 97 (06)
  • [38] Ultrafast lasers for advanced manufacturing of flat panel displays
    Hollister, Terence
    Bovatsek, Jim
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING (LAMOM) XXIV, 2019, 10905
  • [39] Progress in projection and large-area displays
    McLaughlin, CW
    PROCEEDINGS OF THE IEEE, 2002, 90 (04) : 521 - 532
  • [40] Large-area, high-throughput, high-resolution lithography systems for flat-panel displays and microelectronic modules
    Jain, K
    Dunn, T
    Farmiga, N
    Zemel, M
    Weisbecker, C
    EMERGING LITHOGRAPHIC TECHNOLOGIES II, 1998, 3331 : 197 - 206
12345