共 50 条
- [31] Micromachined two-chip, low-cost tunable filter for WDM. MEMS/MOEMS: ADVANCES IN PHOTONIC COMMUNICATIONS, SENSING, METROLOGY, PACKAGING AND ASSEMBLY, 2003, 4945 : 30 - 38
- [33] Feasibility Study of a Low-Cost Feedback Damping Scheme for a Micromachined Capacitive Microphone 2010 AMERICAN CONTROL CONFERENCE, 2010, : 3415 - 3422
- [35] Low-cost surface micromachined Pirani pressure sensor with atmospheric pressure range 2007 CANADIAN CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING, VOLS 1-3, 2007, : 153 - 156
- [36] Photocatalytic water disinfection by simple and low-cost monolithic and heterojunction ceramic wafers Photochemical & Photobiological Sciences, 2015, 14 : 1190 - 1196