A Novel Electromagnetic Force Method for Micro/nano Newton Force Measurement

被引：0
|
作者：
Zhou, Chongkai [1 ]
Tian, Yanling [1 ]
Wang, Fujun [1 ]
Guo, Zhiyong [1 ]
Zhang, Dawei [1 ]
机构：
[1] Tianjin Univ, Minist Educ, Key Lab Mech Theory & Equipment Design, Tianjin 300350, Peoples R China
来源：
2017 IEEE INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) | 2017年
基金：
欧盟地平线“2020”; 中国国家自然科学基金;
关键词：
micro/nano force; electromagnetic force; flexure structure; null position measurement;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400 mu N/mA, the stiffness 27.5N/m.
引用
收藏
页码：40 / 45
页数：6
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