Ultra-wideband surface acoustic wave resonator employing Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 crystals

被引:9
|
作者
Chen, Jing [1 ]
Liu, Jiansong [1 ]
Hashimoto, Ken-ya [1 ]
Omori, Tatsuya [1 ]
Ahn, Changjun [1 ]
Zhao, Xiangyong [2 ]
Luo, Haosu [2 ]
机构
[1] Chiba Univ, Grad Sch Engn, Chiba 2638522, Japan
[2] Chinese Acad Sci, Shanghai Inst Ceram, Key Lab Inorgan Funct Mat & Device, Shanghai 201800, Peoples R China
基金
日本学术振兴会;
关键词
D O I
10.1063/1.3675908
中图分类号
O59 [应用物理学];
学科分类号
摘要
Theoretical analysis showed that high performance surface acoustic wave (SAW) resonator with an extremely large electromechanical coupling factor K 2 could be realized on Y cut X propagating Pb(In1/2Nb1/2)O-3- Pb(Mg1/3Nb2/3)O-3-PbTiO3 (YX-PIN-PMN-PT) substrate. A one-port SAW resonator was designed, fabricated, and characterized on Cu-grating/YX-PIN-PMN-PT substrate structure. The experimental results demonstrate that very large K-2 of 57.3% is realizable. Such an extremely large K-2 makes PIN-PMN-PT single crystal great potential for realizing wideband SAW filters and tunable SAW filters. The influence of inhomogeneity and instability of the domain structure on the fabricated resonators has been discussed thoroughly for further improvement of the devices. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3675908]
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页数:3
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