Experimental and theoretical study of ion energy distribution function in single and dual frequency RF discharges

被引：42

作者：

Rakhimova, Tatyana V. ^{[1
]}

Braginsky, Oleg V. ^{[1
]}

Ivanov, Vladimir V. ^{[1
]}

Kovalev, Alexander S. ^{[1
]}

Lopaev, Dmitry V. ^{[1
]}

Mankelevich, Yuri A. ^{[1
]}

Olevanov, Michael A. ^{[1
]}

Proshina, Olga V. ^{[1
]}

Rakhimov, Alexander T. ^{[1
]}

Vasilieva, Anna N. ^{[1
]}

Voloshin, Dmitry G. ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119992, Russia

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2007年 / 35卷 / 05期

基金：

俄罗斯基础研究基金会;

关键词：

dual frequency (DF) capacitive coupled radiofrequency; (RF) plasma; IEDF measurement; ion energy distribution functions (IEDFs) analytical expression; particle-in-cell (PIC) simulation; sernianalytical IEDF simulation;

D O I：

10.1109/TPS.2007.905201

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Ion energy distribution functions (IEDFs) at the electrodes in single frequency (SF) and dual frequency (DF) radiofrequency discharges in Ar at pressures of 20 and 45 mtorr are measured and calculated. A numerical simulation of the IEDF on the base of a self-consistent particle-in-cell model with Monte Carlo collisions was performed. In addition, a semianalytical model was developed to calculate the IEDF in collisionless and collisional SF and DF plasmas.. The IEDF width for the intermediate frequency case was determined from both experimental and theoretical results. The possibility of frequency decoupling is discussed.

引用

页码：1229 / 1240

页数：12

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