Growth of high quality ZnSe on closely lattice-matched InGaAs substrates by metal organic chemical vapor deposition

Epitaxial ZnSe layers have been grown by metal organic chemical vapor deposition (MOCVD) on GaAs and InGaAs substrates over the temperature range 400-500 degrees C, using either diisopropyl selenide or diethyl selenide with diethyl zinc. The latter combination leads to improved optical and crystal quality at a growth temperature of 500 degrees C. The narrowest double crystal rocking curve width is 100 arcsec in the lattice-matched case with a 3.5% InAs content in the InGaAs substrate, comparable to films grown by molecular beam epitaxy (MBE). Both n- and p-type dopants have been incorporated to fabricate p/n homojunction structures.